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Research Facilities

  • Atomic force microscopy systems (Park Systems, XE-100 & NX10)

    - Glove box to control the ambient

    - Sample temperature stage w/ a Peltier device

    - PCB board for simultaneous electrical characterizations   

    - LED light sources w/ polarizers​

  • Micro-fabrication equipment in a clean room

   - Mask aligner

   - Wet station

   - Optical microscope (Nikon)

   - Surface profilometer (Dektak)

   - Reactive ion etcher (SBT RIE2000)

   - Electron-beam evaporator (Telemark)

   - RF magnetron sputterer

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  • 2D materials transfer set-ups w/ a hot chuck (Instek)

  • Angle-resolved reflectance measurement set-up

  • Variable-temperature vacuum probe station (Janis ST-500)

    - Semiconductor characterization system (Keithley 4200) 

    - Digital oscilloscope (Tektronix DPO4104)

    - Sourcemeter (Keithley 2400)

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  • Micro-Raman/PL system (Nanobase)

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  • Xe lamp and LED light sources for photo-current measurements

  • Wire bonder (Westbond)

  • Two workstations for FDTD simulations

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